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Author's Study on the optimization of the deposition rate of planetary GaN-MOCVD films based on CFD simulation and the corresponding surface model.
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stabilityanalysisofmultiprocessparametersformetalorganicchemicalvapordepositionreactioncavity
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Stability Analysis of Multi Process Parameters for Metal-Organic Chemical Vapor Deposition Reaction Cavity
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1
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studyontheoptimizationofthedepositionrateofplanetaryganmocvdfilmsbasedoncfdsimulationandthecorrespondingsurfacemodel
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Study on the optimization of the deposition rate of planetary GaN-MOCVD films based on CFD simulation and the corresponding surface model.
‡9
1