Leader
|
|
|
00000nz a2200037n 45 0 |
001
|
|
|
J9U|987007315182805171
(VIAF cluster)
|
005
|
|
|
20221012114605.0 |
008
|
|
|
130916n||azznnaabn |a aaa | |
003
|
|
|
J9U |
035
|
|
|
‡a
(J9U)987007315182805171
|
010
|
|
|
‡a
n 97061503
|
024
|
7 |
|
‡a
46873653
‡2
viaf
|
035
|
|
|
‡a
Aleph(NNL10)-004281705
|
040
|
|
|
‡b
mul
|
046
|
|
|
‡f
1954-02-17
‡2
edtf
|
100
|
1 |
|
‡a
Campbell, S. A.
‡9
lat
|
670
|
|
|
‡a
Semiconductor micromachining, c1997-:
‡b
CIP t.p. (S.A. Campbell, School of Pharmacy, Biomedical & Physical Sciences, Univ. Portsmouth, UK)
|
670
|
|
|
‡a
Gate stack and silicide issues... 2002:
‡b
CIP t.p. (S.A. Campbell) galley (Stephen A. Campbell)
|
909
|
|
|
‡a
(viaf) 46873653
‡9
1
|
919
|
|
|
‡a
gatestackandsilicideissues
‡A
Gate stack and silicide issues... 2002:
‡9
1
|
919
|
|
|
‡a
semiconductormicromachining
‡A
Semiconductor micromachining, c1997-:
‡9
1
|
943
|
|
|
‡a
200x
‡A
2002
‡9
1
|
943
|
|
|
‡a
199x
‡A
1997
‡9
1
|
996
|
|
|
‡2
DNB|1159937427
|
996
|
|
|
‡2
SUDOC|259439835
|
996
|
|
|
‡2
BIBSYS|90580025
|
996
|
|
|
‡2
LC|no2016078086
|
996
|
|
|
‡2
ISNI|000000045979823X
|
996
|
|
|
‡2
ISNI|0000000051214560
|
996
|
|
|
‡2
LC|n 84211849
|
996
|
|
|
‡2
CAOONL|ncf11393562
|
996
|
|
|
‡2
WKP|Q19609834
|
996
|
|
|
‡2
SUDOC|221747060
|
996
|
|
|
‡2
ISNI|0000000026774128
|
996
|
|
|
‡2
BNC|981058514826606706
|
996
|
|
|
‡2
NSK|000008501
|
996
|
|
|
‡2
BIBSYS|98020818
|
996
|
|
|
‡2
LC|no 96067570
|
996
|
|
|
‡2
BNF|13611900
|
996
|
|
|
‡2
NII|DA10031612
|
996
|
|
|
‡2
NII|DA05140095
|
996
|
|
|
‡2
ISNI|000000050974138X
|
996
|
|
|
‡2
SUDOC|254027555
|
996
|
|
|
‡2
LC|n 85280762
|
996
|
|
|
‡2
WKP|Q104494881
|
996
|
|
|
‡2
NTA|297093045
|
996
|
|
|
‡2
ISNI|0000000140183444
|
996
|
|
|
‡2
LC|n 97045667
|
996
|
|
|
‡2
ISNI|0000000000347371
|
996
|
|
|
‡2
WKP|Q96186587
|
996
|
|
|
‡2
LC|nb2022004726
|
996
|
|
|
‡2
ISNI|000000002459270X
|
996
|
|
|
‡2
BNF|13543265
|
996
|
|
|
‡2
BIBSYS|11075367
|
996
|
|
|
‡2
WKP|Q90340725
|
996
|
|
|
‡2
LC|no2015131678
|
996
|
|
|
‡2
LC|n 87846128
|
996
|
|
|
‡2
CAOONL|ncf10370057
|
996
|
|
|
‡2
WKP|Q7411061
|
996
|
|
|
‡2
ISNI|0000000114954372
|
996
|
|
|
‡2
LC|n 79061176
|
996
|
|
|
‡2
LC|no2014011016
|
996
|
|
|
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LC|n 79138253
|
996
|
|
|
‡2
NII|DA05778426
|
996
|
|
|
‡2
NKC|xx0189161
|
996
|
|
|
‡2
ISNI|0000000037453389
|
996
|
|
|
‡2
ISNI|0000000024926757
|
996
|
|
|
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WKP|Q119580660
|
996
|
|
|
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NTA|148360858
|
996
|
|
|
‡2
LC|n 2008057533
|
996
|
|
|
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DNB|1217080945
|
996
|
|
|
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LC|no2011150143
|
996
|
|
|
‡2
BAV|495_299348
|
996
|
|
|
‡2
ISNI|0000000430372876
|
996
|
|
|
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WKP|Q123012608
|
996
|
|
|
‡2
ISNI|0000000102252795
|
996
|
|
|
‡2
WKP|Q56336632
|
996
|
|
|
‡2
LC|nb2003049092
|
996
|
|
|
‡2
NTA|146722124
|
996
|
|
|
‡2
SUDOC|052198871
|
996
|
|
|
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WKP|Q75530775
|
996
|
|
|
‡2
ISNI|0000000026380532
|
996
|
|
|
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SUDOC|055824900
|
996
|
|
|
‡2
CAOONL|ncf10226587
|
996
|
|
|
‡2
ISNI|0000000369065585
|
996
|
|
|
‡2
LC|no2018051689
|
996
|
|
|
‡2
BIBSYS|8077341
|
996
|
|
|
‡2
RERO|A023975945
|
996
|
|
|
‡2
WKP|Q89645611
|
996
|
|
|
‡2
LC|no 89010980
|
996
|
|
|
‡2
RERO|A003072357
|
996
|
|
|
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LC|n 82215535
|
996
|
|
|
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NTA|168443686
|
996
|
|
|
‡2
LC|n 79104163
|
996
|
|
|
‡2
BIBSYS|7041192
|
996
|
|
|
‡2
WKP|Q97685043
|
996
|
|
|
‡2
CAOONL|ncf10184178
|
996
|
|
|
‡2
NII|DA05619615
|
996
|
|
|
‡2
BIBSYS|90910098
|
996
|
|
|
‡2
WKP|Q62935292
|
996
|
|
|
‡2
WKP|Q95778452
|
996
|
|
|
‡2
LC|no2021010258
|
996
|
|
|
‡2
LC|no2014163058
|
996
|
|
|
‡2
NUKAT|n 2022071653
|
996
|
|
|
‡2
B2Q|0000426029
|
996
|
|
|
‡2
LC|n 81108612
|
996
|
|
|
‡2
WKP|Q55454834
|
996
|
|
|
‡2
BNF|16962497
|
996
|
|
|
‡2
WKP|Q53443032
|
996
|
|
|
‡2
LC|n 86110378
|
996
|
|
|
‡2
WKP|Q7576007
|
996
|
|
|
‡2
DNB|1157047335
|
996
|
|
|
‡2
CAOONL|ncf11050302
|
996
|
|
|
‡2
CAOONL|ncf11556464
|
996
|
|
|
‡2
ISNI|0000000502652237
|
996
|
|
|
‡2
BNF|14161346
|
996
|
|
|
‡2
NSK|000009250
|
996
|
|
|
‡2
LC|n 87853791
|
996
|
|
|
‡2
WKP|Q86119374
|
996
|
|
|
‡2
LC|n 94024468
|
996
|
|
|
‡2
SUDOC|158518640
|
996
|
|
|
‡2
LC|no2020114769
|
996
|
|
|
‡2
SUDOC|245023356
|
996
|
|
|
‡2
SUDOC|243466676
|
996
|
|
|
‡2
LC|ns2018001972
|
996
|
|
|
‡2
PLWABN|9810620389605606
|
996
|
|
|
‡2
LC|no2018149313
|
996
|
|
|
‡2
WKP|Q56808537
|
996
|
|
|
‡2
DNB|1098581334
|
996
|
|
|
‡2
NII|DA11533365
|
996
|
|
|
‡2
LC|no2005014504
|
996
|
|
|
‡2
BIBSYS|5070954
|
996
|
|
|
‡2
ISNI|0000000036124073
|
996
|
|
|
‡2
CAOONL|ncf11251412
|
996
|
|
|
‡2
NTA|073326216
|
996
|
|
|
‡2
LC|n 2013070723
|
996
|
|
|
‡2
NSK|000715608
|
996
|
|
|
‡2
DNB|1326230840
|
996
|
|
|
‡2
PTBNP|303169
|
996
|
|
|
‡2
WKP|Q90840857
|
996
|
|
|
‡2
LC|no2007083403
|
996
|
|
|
‡2
LC|no2005062357
|
996
|
|
|
‡2
CAOONL|ncf10316332
|
996
|
|
|
‡2
LC|nb2022002920
|
996
|
|
|
‡2
LC|nb2022002921
|
996
|
|
|
‡2
NII|DA04498821
|
996
|
|
|
‡2
LC|nb2022002924
|
996
|
|
|
‡2
BIBSYS|90630260
|
996
|
|
|
‡2
RERO|A023634181
|
996
|
|
|
‡2
WKP|Q92402748
|
996
|
|
|
‡2
LC|n 00037309
|
996
|
|
|
‡2
BNF|16214815
|
996
|
|
|
‡2
ISNI|0000000030630960
|
996
|
|
|
‡2
BNF|15107242
|
996
|
|
|
‡2
BIBSYS|98039486
|
996
|
|
|
‡2
BNF|14490074
|
996
|
|
|
‡2
DNB|1057294179
|
996
|
|
|
‡2
ISNI|0000000019880491
|
996
|
|
|
‡2
CAOONL|ncf10039668
|
996
|
|
|
‡2
WKP|Q58453162
|
996
|
|
|
‡2
WKP|Q92454017
|
996
|
|
|
‡2
LC|n 2018005569
|
996
|
|
|
‡2
BLBNB|000625990
|
996
|
|
|
‡2
ICCU|DDSV233645
|
996
|
|
|
‡2
LC|no2019013599
|
996
|
|
|
‡2
NII|DA05867435
|
996
|
|
|
‡2
LC|no 98012494
|
996
|
|
|
‡2
WKP|Q95841755
|
996
|
|
|
‡2
LC|n 88158807
|
996
|
|
|
‡2
WKP|Q88236124
|
996
|
|
|
‡2
CAOONL|ncf11693268
|
996
|
|
|
‡2
LC|n 86822721
|
996
|
|
|
‡2
BIBSYS|5077688
|
996
|
|
|
‡2
ISNI|0000000499180469
|
996
|
|
|
‡2
LC|no2022076930
|
996
|
|
|
‡2
LC|no2024086937
|
996
|
|
|
‡2
ISNI|000000013517851X
|
996
|
|
|
‡2
NTA|07232273X
|
996
|
|
|
‡2
CAOONL|ncf10141794
|
996
|
|
|
‡2
ISNI|0000000028100143
|
996
|
|
|
‡2
BIBSYS|5030840
|
996
|
|
|
‡2
ISNI|0000000050320660
|
996
|
|
|
‡2
SUDOC|249410141
|
996
|
|
|
‡2
BNF|13532699
|
996
|
|
|
‡2
LC|no2018072544
|
996
|
|
|
‡2
LC|n 2010183489
|
996
|
|
|
‡2
LC|no2023064667
|
996
|
|
|
‡2
CAOONL|ncf11574084
|
996
|
|
|
‡2
DNB|1214612571
|
996
|
|
|
‡2
ISNI|000000050779121X
|
996
|
|
|
‡2
ISNI|0000000034231166
|
996
|
|
|
‡2
CAOONL|ncf10205210
|
996
|
|
|
‡2
LC|nb2022002923
|
996
|
|
|
‡2
BIBSYS|6013788
|
996
|
|
|
‡2
NUKAT|n 00098510
|
996
|
|
|
‡2
LC|nb2015006681
|
996
|
|
|
‡2
NII|DA19821013
|
996
|
|
|
‡2
LC|no2019111362
|
996
|
|
|
‡2
ISNI|0000000387369937
|
996
|
|
|
‡2
ISNI|0000000043695288
|
996
|
|
|
‡2
WKP|Q5076073
|
996
|
|
|
‡2
RERO|A003072403
|
996
|
|
|
‡2
ISNI|0000000074039195
|
996
|
|
|
‡2
RERO|A003072404
|
996
|
|
|
‡2
LC|no2023023040
|
996
|
|
|
‡2
LC|no2015035733
|
996
|
|
|
‡2
RERO|A026592072
|
996
|
|
|
‡2
NTA|31763545X
|
996
|
|
|
‡2
CAOONL|ncf10717497
|
996
|
|
|
‡2
WKP|Q117336337
|
996
|
|
|
‡2
RERO|A020189833
|
996
|
|
|
‡2
LC|n 86128666
|
996
|
|
|
‡2
BIBSYS|5043392
|
996
|
|
|
‡2
LC|n 2021038830
|
996
|
|
|
‡2
WKP|Q83331433
|
996
|
|
|
‡2
SUDOC|267528531
|
996
|
|
|
‡2
SUDOC|165125152
|
996
|
|
|
‡2
LIH|LNB:B_k__y__f_;=CW
|
996
|
|
|
‡2
N6I|vtls000067176
|
996
|
|
|
‡2
SUDOC|22960272X
|
996
|
|
|
‡2
WKP|Q83939887
|
996
|
|
|
‡2
SUDOC|104499419
|
996
|
|
|
‡2
ISNI|0000000082499722
|
996
|
|
|
‡2
LC|n 2002100485
|
996
|
|
|
‡2
PLWABN|9810698876505606
|
996
|
|
|
‡2
RERO|A003072654
|
996
|
|
|
‡2
RERO|A003072656
|
996
|
|
|
‡2
RERO|A003072659
|
996
|
|
|
‡2
ISNI|0000000068108510
|
996
|
|
|
‡2
LC|nr2001008500
|
996
|
|
|
‡2
NII|DA05881072
|
996
|
|
|
‡2
RERO|A024348411
|
996
|
|
|
‡2
LNB|LNC10-000029135
|
996
|
|
|
‡2
WKP|Q86479344
|
996
|
|
|
‡2
SUDOC|075920638
|
996
|
|
|
‡2
WKP|Q91579877
|
996
|
|
|
‡2
ISNI|000000005001855X
|
996
|
|
|
‡2
WKP|Q104490816
|
996
|
|
|
‡2
ISNI|0000000108961525
|
996
|
|
|
‡2
ISNI|000000006756598X
|
996
|
|
|
‡2
WKP|Q64851173
|
996
|
|
|
‡2
LC|no2014127969
|
996
|
|
|
‡2
LC|n 2021183323
|
996
|
|
|
‡2
NII|DA05681131
|
996
|
|
|
‡2
SUDOC|078999170
|
996
|
|
|
‡2
ISNI|0000000114464250
|
996
|
|
|
‡2
LC|n 78067136
|
996
|
|
|
‡2
BIBSYS|10025817
|
996
|
|
|
‡2
DBC|87097968194342
|
996
|
|
|
‡2
SUDOC|07677516X
|
996
|
|
|
‡2
PLWABN|9810606574605606
|
996
|
|
|
‡2
ISNI|0000000074735094
|
996
|
|
|
‡2
BAV|495_160547
|
996
|
|
|
‡2
LC|no2020087098
|
996
|
|
|
‡2
LC|nb2015025013
|
996
|
|
|
‡2
LC|n 98009017
|
996
|
|
|
‡2
WKP|Q92591958
|
996
|
|
|
‡2
ISNI|0000000053447392
|
996
|
|
|
‡2
WKP|Q92843932
|
996
|
|
|
‡2
BLBNB|000275078
|
996
|
|
|
‡2
DNB|1043729895
|
996
|
|
|
‡2
LC|no2011133416
|
996
|
|
|
‡2
LC|no2015032426
|
996
|
|
|
‡2
SUDOC|140481060
|
996
|
|
|
‡2
ISNI|0000000026849126
|
996
|
|
|
‡2
DNB|134342763
|
996
|
|
|
‡2
CAOONL|ncf11594040
|
996
|
|
|
‡2
LC|no2018084996
|
996
|
|
|
‡2
WKP|Q92870909
|
996
|
|
|
‡2
ISNI|0000000069205742
|
996
|
|
|
‡2
WKP|Q98957320
|
996
|
|
|
‡2
BIBSYS|11026786
|
996
|
|
|
‡2
DNB|13480483X
|
997
|
|
|
‡a
1954 0 lived 0217 0
‡9
1
|
998
|
|
|
‡a
Campbell, Stephen A.,
‡2
SUDOC|067143989
‡3
exact title: (1.00, 'semiconductormicromachining', 'semiconductormicromachining')
‡3
viafid
‡3
single date
|
998
|
|
|
‡a
Campbell, Stephen A.
‡2
BIBSYS|90962712
‡3
exact title: (1.00, 'semiconductormicromachining', 'semiconductormicromachining')
‡3
viafid
‡3
single date
|
998
|
|
|
‡a
Campbell, S. A.
‡2
LC|n 97061503
‡3
exact title: (1.00, 'gatestackandsilicideissues', 'gatestackandsilicideissues')
‡3
viafid
‡3
lccn:n97-61503
|
998
|
|
|
‡a
Campbell, S. A.
‡2
ISNI|0000000108961525
‡3
viafid
|
998
|
|
|
‡a
Campbell, S. A.
‡2
NII|DA11316516
‡3
exact title: (1.00, 'semiconductormicromachining', 'semiconductormicromachining')
‡3
viafid
|
998
|
|
|
‡a
Campbell, S. A.
‡2
DNB|1024073254
‡3
exact name
|
998
|
|
|
‡a
Campbell
‡b
Stephen A.
‡2
BNF|12544606
‡3
exact title: (1.00, 'semiconductormicromachining', 'semiconductormicromachining')
‡3
viafid
|