VIAF

Virtual International Authority File

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Leader 00000nz a2200037n 45 0
001 J9U|987007315182805171 (VIAF cluster)
005 20221012114605.0
008 130916n||azznnaabn |a aaa |
003 J9U
035 ‎‡a (J9U)987007315182805171‏
010 ‎‡a n 97061503‏
024 7 ‎‡a 46873653‏ ‎‡2 viaf‏
035 ‎‡a Aleph(NNL10)-004281705‏
040 ‎‡b mul‏
046 ‎‡f 1954-02-17‏ ‎‡2 edtf‏
100 1 ‎‡a Campbell, S. A.‏ ‎‡9 lat‏
670 ‎‡a Semiconductor micromachining, c1997-:‏ ‎‡b CIP t.p. (S.A. Campbell, School of Pharmacy, Biomedical & Physical Sciences, Univ. Portsmouth, UK)‏
670 ‎‡a Gate stack and silicide issues... 2002:‏ ‎‡b CIP t.p. (S.A. Campbell) galley (Stephen A. Campbell)‏
909 ‎‡a (viaf) 46873653‏ ‎‡9 1‏
919 ‎‡a gatestackandsilicideissues‏ ‎‡A Gate stack and silicide issues... 2002:‏ ‎‡9 1‏
919 ‎‡a semiconductormicromachining‏ ‎‡A Semiconductor micromachining, c1997-:‏ ‎‡9 1‏
943 ‎‡a 200x‏ ‎‡A 2002‏ ‎‡9 1‏
943 ‎‡a 199x‏ ‎‡A 1997‏ ‎‡9 1‏
996 ‎‡2 DNB|1159937427
996 ‎‡2 SUDOC|259439835
996 ‎‡2 BIBSYS|90580025
996 ‎‡2 LC|no2016078086
996 ‎‡2 ISNI|000000045979823X
996 ‎‡2 ISNI|0000000051214560
996 ‎‡2 LC|n 84211849
996 ‎‡2 CAOONL|ncf11393562
996 ‎‡2 WKP|Q19609834
996 ‎‡2 SUDOC|221747060
996 ‎‡2 ISNI|0000000026774128
996 ‎‡2 BNC|981058514826606706
996 ‎‡2 NSK|000008501
996 ‎‡2 BIBSYS|98020818
996 ‎‡2 LC|no 96067570
996 ‎‡2 BNF|13611900
996 ‎‡2 NII|DA10031612
996 ‎‡2 NII|DA05140095
996 ‎‡2 ISNI|000000050974138X
996 ‎‡2 SUDOC|254027555
996 ‎‡2 LC|n 85280762
996 ‎‡2 WKP|Q104494881
996 ‎‡2 NTA|297093045
996 ‎‡2 ISNI|0000000140183444
996 ‎‡2 LC|n 97045667
996 ‎‡2 ISNI|0000000000347371
996 ‎‡2 WKP|Q96186587
996 ‎‡2 LC|nb2022004726
996 ‎‡2 ISNI|000000002459270X
996 ‎‡2 BNF|13543265
996 ‎‡2 BIBSYS|11075367
996 ‎‡2 WKP|Q90340725
996 ‎‡2 LC|no2015131678
996 ‎‡2 LC|n 87846128
996 ‎‡2 CAOONL|ncf10370057
996 ‎‡2 WKP|Q7411061
996 ‎‡2 ISNI|0000000114954372
996 ‎‡2 LC|n 79061176
996 ‎‡2 LC|no2014011016
996 ‎‡2 LC|n 79138253
996 ‎‡2 NII|DA05778426
996 ‎‡2 NKC|xx0189161
996 ‎‡2 ISNI|0000000037453389
996 ‎‡2 ISNI|0000000024926757
996 ‎‡2 WKP|Q119580660
996 ‎‡2 NTA|148360858
996 ‎‡2 LC|n 2008057533
996 ‎‡2 DNB|1217080945
996 ‎‡2 LC|no2011150143
996 ‎‡2 BAV|495_299348
996 ‎‡2 ISNI|0000000430372876
996 ‎‡2 WKP|Q123012608
996 ‎‡2 ISNI|0000000102252795
996 ‎‡2 WKP|Q56336632
996 ‎‡2 LC|nb2003049092
996 ‎‡2 NTA|146722124
996 ‎‡2 SUDOC|052198871
996 ‎‡2 WKP|Q75530775
996 ‎‡2 ISNI|0000000026380532
996 ‎‡2 SUDOC|055824900
996 ‎‡2 CAOONL|ncf10226587
996 ‎‡2 ISNI|0000000369065585
996 ‎‡2 LC|no2018051689
996 ‎‡2 BIBSYS|8077341
996 ‎‡2 RERO|A023975945
996 ‎‡2 WKP|Q89645611
996 ‎‡2 LC|no 89010980
996 ‎‡2 RERO|A003072357
996 ‎‡2 LC|n 82215535
996 ‎‡2 NTA|168443686
996 ‎‡2 LC|n 79104163
996 ‎‡2 BIBSYS|7041192
996 ‎‡2 WKP|Q97685043
996 ‎‡2 CAOONL|ncf10184178
996 ‎‡2 NII|DA05619615
996 ‎‡2 BIBSYS|90910098
996 ‎‡2 WKP|Q62935292
996 ‎‡2 WKP|Q95778452
996 ‎‡2 LC|no2021010258
996 ‎‡2 LC|no2014163058
996 ‎‡2 NUKAT|n 2022071653
996 ‎‡2 B2Q|0000426029
996 ‎‡2 LC|n 81108612
996 ‎‡2 WKP|Q55454834
996 ‎‡2 BNF|16962497
996 ‎‡2 WKP|Q53443032
996 ‎‡2 LC|n 86110378
996 ‎‡2 WKP|Q7576007
996 ‎‡2 DNB|1157047335
996 ‎‡2 CAOONL|ncf11050302
996 ‎‡2 CAOONL|ncf11556464
996 ‎‡2 ISNI|0000000502652237
996 ‎‡2 BNF|14161346
996 ‎‡2 NSK|000009250
996 ‎‡2 LC|n 87853791
996 ‎‡2 WKP|Q86119374
996 ‎‡2 LC|n 94024468
996 ‎‡2 SUDOC|158518640
996 ‎‡2 LC|no2020114769
996 ‎‡2 SUDOC|245023356
996 ‎‡2 SUDOC|243466676
996 ‎‡2 LC|ns2018001972
996 ‎‡2 PLWABN|9810620389605606
996 ‎‡2 LC|no2018149313
996 ‎‡2 WKP|Q56808537
996 ‎‡2 DNB|1098581334
996 ‎‡2 NII|DA11533365
996 ‎‡2 LC|no2005014504
996 ‎‡2 BIBSYS|5070954
996 ‎‡2 ISNI|0000000036124073
996 ‎‡2 CAOONL|ncf11251412
996 ‎‡2 NTA|073326216
996 ‎‡2 LC|n 2013070723
996 ‎‡2 NSK|000715608
996 ‎‡2 DNB|1326230840
996 ‎‡2 PTBNP|303169
996 ‎‡2 WKP|Q90840857
996 ‎‡2 LC|no2007083403
996 ‎‡2 LC|no2005062357
996 ‎‡2 CAOONL|ncf10316332
996 ‎‡2 LC|nb2022002920
996 ‎‡2 LC|nb2022002921
996 ‎‡2 NII|DA04498821
996 ‎‡2 LC|nb2022002924
996 ‎‡2 BIBSYS|90630260
996 ‎‡2 RERO|A023634181
996 ‎‡2 WKP|Q92402748
996 ‎‡2 LC|n 00037309
996 ‎‡2 BNF|16214815
996 ‎‡2 ISNI|0000000030630960
996 ‎‡2 BNF|15107242
996 ‎‡2 BIBSYS|98039486
996 ‎‡2 BNF|14490074
996 ‎‡2 DNB|1057294179
996 ‎‡2 ISNI|0000000019880491
996 ‎‡2 CAOONL|ncf10039668
996 ‎‡2 WKP|Q58453162
996 ‎‡2 WKP|Q92454017
996 ‎‡2 LC|n 2018005569
996 ‎‡2 BLBNB|000625990
996 ‎‡2 ICCU|DDSV233645
996 ‎‡2 LC|no2019013599
996 ‎‡2 NII|DA05867435
996 ‎‡2 LC|no 98012494
996 ‎‡2 WKP|Q95841755
996 ‎‡2 LC|n 88158807
996 ‎‡2 WKP|Q88236124
996 ‎‡2 CAOONL|ncf11693268
996 ‎‡2 LC|n 86822721
996 ‎‡2 BIBSYS|5077688
996 ‎‡2 ISNI|0000000499180469
996 ‎‡2 LC|no2022076930
996 ‎‡2 LC|no2024086937
996 ‎‡2 ISNI|000000013517851X
996 ‎‡2 NTA|07232273X
996 ‎‡2 CAOONL|ncf10141794
996 ‎‡2 ISNI|0000000028100143
996 ‎‡2 BIBSYS|5030840
996 ‎‡2 ISNI|0000000050320660
996 ‎‡2 SUDOC|249410141
996 ‎‡2 BNF|13532699
996 ‎‡2 LC|no2018072544
996 ‎‡2 LC|n 2010183489
996 ‎‡2 LC|no2023064667
996 ‎‡2 CAOONL|ncf11574084
996 ‎‡2 DNB|1214612571
996 ‎‡2 ISNI|000000050779121X
996 ‎‡2 ISNI|0000000034231166
996 ‎‡2 CAOONL|ncf10205210
996 ‎‡2 LC|nb2022002923
996 ‎‡2 BIBSYS|6013788
996 ‎‡2 NUKAT|n 00098510
996 ‎‡2 LC|nb2015006681
996 ‎‡2 NII|DA19821013
996 ‎‡2 LC|no2019111362
996 ‎‡2 ISNI|0000000387369937
996 ‎‡2 ISNI|0000000043695288
996 ‎‡2 WKP|Q5076073
996 ‎‡2 RERO|A003072403
996 ‎‡2 ISNI|0000000074039195
996 ‎‡2 RERO|A003072404
996 ‎‡2 LC|no2023023040
996 ‎‡2 LC|no2015035733
996 ‎‡2 RERO|A026592072
996 ‎‡2 NTA|31763545X
996 ‎‡2 CAOONL|ncf10717497
996 ‎‡2 WKP|Q117336337
996 ‎‡2 RERO|A020189833
996 ‎‡2 LC|n 86128666
996 ‎‡2 BIBSYS|5043392
996 ‎‡2 LC|n 2021038830
996 ‎‡2 WKP|Q83331433
996 ‎‡2 SUDOC|267528531
996 ‎‡2 SUDOC|165125152
996 ‎‡2 LIH|LNB:B_k__y__f_;=CW
996 ‎‡2 N6I|vtls000067176
996 ‎‡2 SUDOC|22960272X
996 ‎‡2 WKP|Q83939887
996 ‎‡2 SUDOC|104499419
996 ‎‡2 ISNI|0000000082499722
996 ‎‡2 LC|n 2002100485
996 ‎‡2 PLWABN|9810698876505606
996 ‎‡2 RERO|A003072654
996 ‎‡2 RERO|A003072656
996 ‎‡2 RERO|A003072659
996 ‎‡2 ISNI|0000000068108510
996 ‎‡2 LC|nr2001008500
996 ‎‡2 NII|DA05881072
996 ‎‡2 RERO|A024348411
996 ‎‡2 LNB|LNC10-000029135
996 ‎‡2 WKP|Q86479344
996 ‎‡2 SUDOC|075920638
996 ‎‡2 WKP|Q91579877
996 ‎‡2 ISNI|000000005001855X
996 ‎‡2 WKP|Q104490816
996 ‎‡2 ISNI|0000000108961525
996 ‎‡2 ISNI|000000006756598X
996 ‎‡2 WKP|Q64851173
996 ‎‡2 LC|no2014127969
996 ‎‡2 LC|n 2021183323
996 ‎‡2 NII|DA05681131
996 ‎‡2 SUDOC|078999170
996 ‎‡2 ISNI|0000000114464250
996 ‎‡2 LC|n 78067136
996 ‎‡2 BIBSYS|10025817
996 ‎‡2 DBC|87097968194342
996 ‎‡2 SUDOC|07677516X
996 ‎‡2 PLWABN|9810606574605606
996 ‎‡2 ISNI|0000000074735094
996 ‎‡2 BAV|495_160547
996 ‎‡2 LC|no2020087098
996 ‎‡2 LC|nb2015025013
996 ‎‡2 LC|n 98009017
996 ‎‡2 WKP|Q92591958
996 ‎‡2 ISNI|0000000053447392
996 ‎‡2 WKP|Q92843932
996 ‎‡2 BLBNB|000275078
996 ‎‡2 DNB|1043729895
996 ‎‡2 LC|no2011133416
996 ‎‡2 LC|no2015032426
996 ‎‡2 SUDOC|140481060
996 ‎‡2 ISNI|0000000026849126
996 ‎‡2 DNB|134342763
996 ‎‡2 CAOONL|ncf11594040
996 ‎‡2 LC|no2018084996
996 ‎‡2 WKP|Q92870909
996 ‎‡2 ISNI|0000000069205742
996 ‎‡2 WKP|Q98957320
996 ‎‡2 BIBSYS|11026786
996 ‎‡2 DNB|13480483X
997 ‎‡a 1954 0 lived 0217 0‏ ‎‡9 1‏
998 ‎‡a Campbell, Stephen A.,‏ ‎‡2 SUDOC|067143989‏ ‎‡3 exact title: (1.00, 'semiconductormicromachining', 'semiconductormicromachining')‏ ‎‡3 viafid‏ ‎‡3 single date‏
998 ‎‡a Campbell, Stephen A.‏ ‎‡2 BIBSYS|90962712‏ ‎‡3 exact title: (1.00, 'semiconductormicromachining', 'semiconductormicromachining')‏ ‎‡3 viafid‏ ‎‡3 single date‏
998 ‎‡a Campbell, S. A.‏ ‎‡2 LC|n 97061503‏ ‎‡3 exact title: (1.00, 'gatestackandsilicideissues', 'gatestackandsilicideissues')‏ ‎‡3 viafid‏ ‎‡3 lccn:n97-61503‏
998 ‎‡a Campbell, S. A.‏ ‎‡2 ISNI|0000000108961525‏ ‎‡3 viafid‏
998 ‎‡a Campbell, S. A.‏ ‎‡2 NII|DA11316516‏ ‎‡3 exact title: (1.00, 'semiconductormicromachining', 'semiconductormicromachining')‏ ‎‡3 viafid‏
998 ‎‡a Campbell, S. A.‏ ‎‡2 DNB|1024073254‏ ‎‡3 exact name‏
998 ‎‡a Campbell‏ ‎‡b Stephen A.‏ ‎‡2 BNF|12544606‏ ‎‡3 exact title: (1.00, 'semiconductormicromachining', 'semiconductormicromachining')‏ ‎‡3 viafid‏