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00000nz a2200037n 45 0 |
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19840322000000.0 |
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(LC)n 83158031
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n 83158031
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DLC
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100
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1 |
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Brown, Dale M.
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670
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Plasma processing for VLSI, 1984:
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CIP t.p. (Dale M. Brown, Gen. Electric Co., Corp. Research & Dev., Schenectady, N.Y.)
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901
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978012234108
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903
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83022351
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1
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910
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plasmaprocessingforvlsi
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Plasma processing for VLSI /
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eng
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919
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plasmaprocessingforvlsi
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Plasma processing for VLSI, 1984:
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1
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920
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978-012
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1
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921
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academic press
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Academic Press,
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1
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922
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nyu
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us
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940
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eng
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TK7874
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198x
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1984
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am
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950
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einspruch norman g
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Einspruch, Norman G.
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0 0 lived 0 0
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1
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998
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‡a
Brown, Dale M.
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ISNI|0000000115564712
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joint author: (1.00, 'einspruch norman g', 'einspruch norman g')
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Brown, Dale M.
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NDL|00434525
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exact name
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998
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Brown, Dale M.
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SUDOC|169847659
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standard number
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998
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Brown, Dale M.
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viafid
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standard number
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998
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Brown, Dale M.
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J9U|987007318761505171
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exact title: (1.00, 'plasmaprocessingforvlsi', 'plasmaprocessingforvlsi')
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viafid
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lccn:n83-158031
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998
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Brown, Dale M.
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BIBSYS|90144970
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Brown, Dale M.
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exact name
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999
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LCBIB|83022351
|
