VIAF

Virtual International Authority File

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Leader 00000nz a2200037n 45 0
001 WKP|Q101047711 (VIAF cluster) (Authority/Source Record)
003 WKP
005 20241221010631.0
008 241221nneanz||abbn n and d
035 ‎‡a (WKP)Q101047711‏
024 ‎‡a 0000-0002-8656-2420‏ ‎‡2 orcid‏
035 ‎‡a (OCoLC)Q101047711‏
100 0 ‎‡a Diana Mata-Hernandez‏ ‎‡c researcher‏ ‎‡9 en‏
400 0 ‎‡a Diana Mata-Hernandez‏ ‎‡c onderzoeker‏ ‎‡9 nl‏
670 ‎‡a Author's Resonant MEMS Pressure Sensor in 180 nm CMOS Technology Obtained by BEOL Isotropic Etching‏
909 ‎‡a (orcid) 0000000286562420‏ ‎‡9 1‏
919 ‎‡a resonantmemspressuresensorin180nmcmostechnologyobtainedbybeolisotropicetching‏ ‎‡A Resonant MEMS Pressure Sensor in 180 nm CMOS Technology Obtained by BEOL Isotropic Etching‏ ‎‡9 1‏
996 ‎‡2 BNE|XX1616015‏
996 ‎‡2 LC|ns2016000450‏
996 ‎‡2 SUDOC|20083665X‏
996 ‎‡2 LC|ns2018003175‏
996 ‎‡2 ISNI|0000000055026532‏
996 ‎‡2 DNB|1057668311‏
996 ‎‡2 DNB|1193006171‏
996 ‎‡2 LC|no2003107434‏
996 ‎‡2 LC|n 2005001591‏
996 ‎‡2 ISNI|000000003683063X‏
996 ‎‡2 SUDOC|119990520‏
996 ‎‡2 LC|n 2004039393‏
996 ‎‡2 DNB|1256307963‏
996 ‎‡2 LC|no2010092019‏
996 ‎‡2 LC|no2024072203‏
996 ‎‡2 ISNI|0000000023815764‏
996 ‎‡2 LC|ns2015002360‏
996 ‎‡2 ISNI|0000000037038740‏
996 ‎‡2 ISNI|0000000452099604‏
996 ‎‡2 LC|no2014145039‏
996 ‎‡2 LC|no2022154616‏
996 ‎‡2 LC|ns2014001854‏
996 ‎‡2 LC|ns2024000262‏
996 ‎‡2 LC|no2010061432‏
996 ‎‡2 LC|no2021148634‏
996 ‎‡2 DNB|1341620689‏
996 ‎‡2 LC|n 2024062627‏
996 ‎‡2 LC|ns2024002863‏
996 ‎‡2 LC|no2024068369‏
996 ‎‡2 LC|no2008173475‏
996 ‎‡2 ISNI|0000000080493335‏
996 ‎‡2 PLWABN|9811472796905606‏
996 ‎‡2 LC|ns2017002715‏
996 ‎‡2 LC|ns2023003286‏
996 ‎‡2 LC|no2013023741‏
996 ‎‡2 LC|no2021138206‏
996 ‎‡2 DNB|1279041676‏
996 ‎‡2 DNB|1237016207‏
996 ‎‡2 ISNI|0000000401813679‏
996 ‎‡2 BNF|14535082‏
996 ‎‡2 LC|n 2013037101‏
996 ‎‡2 LC|n 2015048501‏
996 ‎‡2 LC|no2010020409‏
996 ‎‡2 DNB|1185688722‏
996 ‎‡2 DNB|1054355002‏
996 ‎‡2 ISNI|0000000078128902‏
996 ‎‡2 DNB|1056715375‏
996 ‎‡2 NSK|000039164‏
996 ‎‡2 LC|no2011158862‏
996 ‎‡2 LC|no2009024676‏
996 ‎‡2 JPG|500241943‏
996 ‎‡2 LC|n 83124446‏
996 ‎‡2 DBC|87097969955444‏
996 ‎‡2 LC|ns2021001703‏
996 ‎‡2 RERO|A026545582‏
996 ‎‡2 SUDOC|281316309‏
996 ‎‡2 SUDOC|264172876‏
997 ‎‡a 0 0 lived 0 0‏ ‎‡9 1‏